EUV/ X-ray optics

X-ray chart

X-ray chart

產品說明

NTT-AT's X-ray resolution evaluation charts are applied to several X-ray analysis situations which require ultra-high resolution, such as X-ray microscopes, X-ray micro-beam analysis, and X-ray imaging. This de facto standard X-ray chart is used in a very large number of situations throughout the world.
High X-ray irradiation durability, ultra-sharp pattern, and low edge roughness. These are the biggest features of NTT-AT's X-ray chart. Our SiC membrane based Ta absorber chart has proved to be outstandingly accurate and provides clear images for your X-ray analysis system evaluation.
Please try out the proven performance as the de facto standard.

產品特色

Three types of X-ray chart are available for various applications: standard type, high resolution and high contrast type, and ultra-high resolution type. Customization of the pattern layout and substrate dimensions is available for your system.

產品參數

Item

Standard type
XRESO-100

High resolution type
with thicker Ta
absorber
XRESO-50HC

NEW!!
Ultra high resolution
XRESO-20

Substrate

Material / Size

Si 10mm square

Thickness

1mm

1mm

0.625mm

Membrane

Material /
Thickness

Ru 20nm
SiN 2µm

Ru 20nm
SiC 200nm
SiN 50nm

Ru 20nm
SiC 200nm
SiN 50nm

Area

1mm square

1mm square

1mm square

Alignment

Center of the substrate

Center of the substrate

Center of the substrate

Pattern

Absorber /
Thickness

Ta 1µm

Ta 500nm

Ta 100nm

Minimum pattern
size

100nm

50nm

20nm
Radial Pattern

Patterned area

250µm × 350µm

300µm square

300µm square

Schematic of X-ray chart (High resolution chart)