EUV/ X-ray optics

X-ray Fresnel Zone Plate (FZP)

X-ray Fresnel Zone Plate (FZP)

產品說明

NTT-AT's Fresnel Zone Plate (FZP), constructed from SiC membrane and Ta absorber pattern, has an outstandingly high X-ray irradiation durability, high resolution, and high contrast.
Only NTT-AT provides the SiC membrane-based Fresnel Zone Plate (FZP), which has an outstandingly high X-ray irradiation durability. NTT-AT's FZP is constructed from dry etched Ta. It has a sharp absorber pattern and achieves a high S/N ratio and low defect imaging, and is ideal for applications such as X-ray microscopes, X-ray micro-beam irradiation, and X-ray imaging.
In addition, the Ta pattern/SiN membrane-type FZP and Au plated pattern/SiN membrane-type FZP are provided for using in soft X-ray and extreme ultraviolet (EUV/XUV) regions. In addition, a Step (Kinoform) FZP is available.

產品特色

  • Useful for various X-ray applications such as X-ray microscopes, EUV microscopes, X-ray microbeam irradiation, and synchrotron radiation beam monitors, etc.
  • Outstandingly high X-ray irradiation durability
  • Minimum zone width up to 25 nm
  • Customized FZP also available

產品參數

Model

Aspect
Ratio

Membrane
Material

Membrane
Thickness
(µm)

ΔRn
(nm)

D (um)

N

Tm (nm)

FZP-S38/84

4.2

SiN

0.15

38

84

550

160

FZP-S50/80

5

SiN

0.2

50

80

400

250

FZP-S40/155

5

SiN

2

40

155

970

200

FZP-S50/330

8

SiN

1

50

330

1,650

400

FZP-S86/416

8

SiN

2

86

416

1,200

700

FZP-100/155

8

SiN

2

100

155

388

800

FZP-173/208

5.8

SiN

2

173

208

300

1,000

FZP-200/206

8

SiN

2

200

206

255

1,600

FZP-C234/2500

0.6

SiC

0.2

234

2,500

2,670

150

* Please note that the specifications may be subject to change without notice.

Rn : Outermost Zone Width
D : Diameter
N : Total Zone
Tm : Ta Thickness

Standard lead time: 12 weeks

Pattern image (φ2.5mm)

(Optical microscope)

Observed SEM image with diagonal angle

(SEM)
Fresnel Zone Plate (FZP) Structure

Binary type

Step (kinoform) type

Minimum zone width (outer most zone)

25nm

Maximum diameter

5mm

Membrane material

SiN, SiC

Membrane thickness

0.2-2µm

Absorber material

Ta

Absorber thickness

0.1-2µm

Si substrate shape

10mm square

Si substrate thickness

1mm

*We will be pleased to discuss different requirements with you.


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